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Yamazaki, Takumi*; Hirai, Takamasa*; Yagi, Takashi*; Yamashita, Yuichiro*; Uchida, Kenichi*; Seki, Takeshi*; Takanashi, Koki
Physical Review Applied (Internet), 21(2), p.024039_1 - 024039_11, 2024/02
Times Cited Count:0Kumada, Takayuki; Miura, Daisuke*; Akutsu, Kazuhiro*; Oku, Takayuki; Torikai, Naoya*; Niizeki, Tomotake*
Hamon, 32(4), p.165 - 168, 2022/11
We demonstrated the advantage of spin-contrast-variation neutron reflectometry on the structure analysis of buried interface between resin and porous silica layers. The interface structure was not reproduced by the normal Gaussian model, but by the asymmetric interface model where crosslinked polymer chains neither permeate the pore nor follow the surface roughness of the silica layer.
Kumada, Takayuki; Miura, Daisuke*; Akutsu, Kazuhiro*; Oishi, Kazuki*; Morikawa, Toshiaki*; Kawamura, Yukihiko*; Suzuki, Junichi*; Oku, Takayuki; Torikai, Naoya*; Niizeki, Tomotake*
Journal of Applied Crystallography, 55(5), p.1147 - 1153, 2022/10
Times Cited Count:1 Percentile:29.53(Chemistry, Multidisciplinary)Spin-contrast-variation neutron reflectivity obtains multiple reflectivity curves from a single sample and a single beam source. We used the strong point of the technique to reveal that, although methylated-perhydropolysilazane-derived silica layer has a higher porosity near the interface with acrylic urethane resin, the resin did not permeate the pore network.
Kumada, Takayuki; Miura, Daisuke*; Akutsu, Kazuhiro*; Suzuki, Junichi*; Torikai, Naoya*
Hamon, 30(4), p.207 - 211, 2020/11
We developed a technique of spin-contrast-variation neutron reflectivity (SCV-NR) for structural analyses of multilayer films. The SCV-NR curves of the polystyrene monolayer film were precisely reproduced using a common set of structural parameters and neutron scattering length density at each proton polarization. This result ensures that SCV-NR curves are not deformed by inhomogeneous PH due to the spin-diffusion mechanism. The number of structural parameters of the lamellar microphase-separated poly(styrene-block-isoprene) thin film is too large to determine with a single unpolarized reflectivity curve only. However, these parameters converged through the global analysis of the SCV-NR curves. In this manner, SCV-NR determines the structure of multilayer films while excluding the incorrect structural model that accidentally accounts for a single unpolarized reflectivity curve only.
Nishikino, Masaharu; Ishino, Masahiko; Ichimaru, Satoshi*; Hatayama, Masatoshi*; Hasegawa, Noboru; Kawachi, Tetsuya
Reza Gakkai Dai-483-Kai Kenkyukai Hokoku; Tanhacho Ryoshi Bimu Hassei To Sono Oyo, p.25 - 28, 2015/12
X-ray ablation has been recently achieved using plasma soft X-ray lasers (SXRLs), laser plasma soft X-rays, and X-ray free electron lasers. In order to study the interactions between picosecond SXRL beams and material and multi-layered structure surfaces were irradiated with SXRL pulse. Following irradiation, the substrate surface was observed using a scanning electron microscope and an atomic force microscope. The surface modifications caused by the SXRL beam were clearly seen. The multi-layered mirror is the important component for the EUV lithography. Then, we have started the damage test of multi-layered structure, and the surface modifications caused by the SXRL pulse irradiations were confirmed.
Fukami, Shunsuke*; Ieda, Junichi; Ohno, Hideo*
Physical Review B, 91(23), p.235401_1 - 235401_7, 2015/06
Times Cited Count:22 Percentile:66.77(Materials Science, Multidisciplinary)We study thermal stability of a magnetic domain wall pinned in nanowires made of Co/Ni multilayers, and analyze the effective volume that governs the thermal stability. We find that, above a critical wire width, the domain wall depinning is initiated by a subvolume excitation and that the critical width is dependent on the wire thickness. The obtained findings are supported by the distribution of critical current density for domain wall depinning and are qualitatively described by considering the balance between the Zeeman energy and domain wall elastic energy.
Koike, Masato; Imazono, Takashi; Ishino, Masahiko
Advances in X-Ray Chemical Analysis, Japan, 46, p.159 - 166, 2015/03
The demand for the physical-properties research using powerful light sources, such as synchrotron radiation and soft-X-rays laser light, is increasing. When promoting such research, it is required to develop efficient soft-X-ray spectrometers suitable for absorption, emission, and fluorescence which are appeared in an energy rage of 1-8 keV. We describe the development of laminar type diffraction gratings which enhance diffraction efficiency remarkably by use of soft-X-ray multilayers instead of single metal layers.
Ishino, Masahiko; Yoda, Osamu*; Koike, Masato
JAERI-Research 2005-019, 13 Pages, 2005/09
We have developed soft X-ray multilayer mirrors for use around the wavelength region of 4 nm including the K-absorption edge of carbon (). We have chosen CoO and Cr as the final candidate materials for absorber layers, and SiO and Sc for the spacer materials as the result of theoretical invitation. CoO/SiO, CoO/Sc and Cr/Sc multilayer mirrors have been fabricated by means of an ion beam sputtering (IBS) method. As the result of structure evaluations with X-ray diffraction measurement, we have found that the fabricated CoO/Sc and Cr/Sc multilayer mirrors have stable structures. Soft X-ray reflectivity measurements for fabricated multilayer mirrors are carried out in the wavelength region of 4 nm with a synchrotron radiation source. We have found that the Cr/Sc multilayer mirror has a high soft X-ray reflectivity. However, soft X-ray reflectivities below the absorption edge of carbon are reduced. The analyses obtained by EPMA and SIMS suggested that this phenomenon was attributed to contamination of carbon.
Agui, Akane; Mizumaki, Masaichiro*
Shingaku Giho, 104(409), p.7 - 10, 2004/11
no abstracts in English
Agui, Akane; Mizumaki, Masaichiro*; Matsushita, Tomohiro*; Asahi, Toru*; Kawaji, Jun*; Sayama, Junichi*; Osaka, Tetsuya*
Journal of Applied Physics, 95(12), p.7825 - 7831, 2004/06
Times Cited Count:6 Percentile:27.83(Physics, Applied)The electronic and spin states of [Co/Pd] multilayered perpendicular magnetization films with various seedlayers have been investigated by means of soft X-ray absorption and magnetic circular dichroism spectroscopy at the Co -edges. The expectation values of the orbital angular momentum and the spin angular momentum of Co atom in the [Co/Pd] multilayered film were estimated using the sum rule. It was found that the seedlayer changes macroscopic magnetic properties of the [Co/Pd] multilayered film without affecting the electronic and spin states of the upper layers of Co.
Ishino, Masahiko; Yoda, Osamu
Applied Optics, 43(9), p.1849 - 1855, 2004/03
Times Cited Count:1 Percentile:8.6(Optics)The development of multilayer mirrors for continual use around the K-absorption edge of carbon (4.4 nm) has been begun. CoO, SiO, and BN are found to be suitable for multilayer mirrors based on theoretical calculations for wavelengths around the carbon K-absorption edge region. X-ray reflectivity curves with Cu X rays of the fabricated CoO/SiO multilayers have sharp Bragg peaks and the layer structures evaluated from TEM observations are uniform. On the other hand, the Bragg peaks of CoO/BN multilayers split and aggregated CoO is observed. To improve the CoO layer structure, CrO was mixed into CoO. The mixed oxide layer structure in the Mix/BN multilayer (Mix = CoO + CrO) is relatively uniform and the Bragg peaks do not split.
Ishino, Masahiko; Yoda, Osamu; Takenaka, Hisataka*; Sano, Kazuo*; Koike, Masato
Surface & Coatings Technology, 169-170(1-3), p.628 - 631, 2003/06
no abstracts in English
Tanaka, Momoko; Kawachi, Tetsuya
Purazuma, Kaku Yugo Gakkai-Shi, 79(4), p.386 - 390, 2003/04
no abstracts in English
Ishino, Masahiko; Yoda, Osamu; Sano, Kazuo*; Koike, Masato
X-Ray Mirrors, Crystals, and Multilayers II (Proceedings of SPIE Vol.4782), p.277 - 284, 2002/12
no abstracts in English
Ishino, Masahiko; Yoda, Osamu
Journal of Applied Physics, 92(9), p.4952 - 4958, 2002/11
Times Cited Count:6 Percentile:28.33(Physics, Applied)no abstracts in English
Koike, Masato; Sano, Kazuo*; Harada, Yoshihisa*; Yoda, Osamu; Ishino, Masahiko; Tamura, Keisuke*; Yamashita, Kojun*; Moriya, Naoji*; Sasai, Hiroyuki*; Jinno, Masafumi*; et al.
X-Ray Mirrors, Crystals, and Multilayers II (Proceedings of SPIE Vol.4782), p.300 - 307, 2002/07
For the purpose of realizing an evaluation beamline for characterizing soft X-ray optical elements in a wide wavelength range of 0.7-25 nm, we have designed and constructed a new type of monochromator that combined two types of Monk-Gillieson monochromators. One is a conventional type equipped with three varied-line-spacing plane gratings, allowing a choice of two included angles. The other is a new type that employs a scanning mechanism based on Surface Normal Rotation (SNR). The SNR scheme provides high throughput at short wavelengths and simple scanning mechanism by means of a grating rotation about its normal. The monochromator is operated in the SNR and conventional modes over the ranges of 0.7-2.0 nm and 2.0-25 nm, respectively. In this paper we describe the optical and mechanical designs of the monochromator, wavelength calibrations in the SNR mode, and preliminary experimental data, such as the transmittance of an Al filter at 0.8 nm and the total yield photoelectron measurement on a MgO powder in a wavelength rage of 0.7-2 nm.
Muramatsu, Yasuji; Takenaka, Hisataka*; Gullikson, E. M.*; Perera, R. C. C.*
Japanese Journal of Applied Physics, Part 1, 41(6B), p.4250 - 4252, 2002/06
Times Cited Count:9 Percentile:38.06(Physics, Applied)no abstracts in English
Ishino, Masahiko; Yoda, Osamu; Haishi, Yasuyuki*; Arimoto, Fumiko*; Takeda, Mitsuhiro*; Watanabe, Seiichi*; Onuki, Somei*; Abe, Hiroaki
Japanese Journal of Applied Physics, Part 1, 41(5A), p.3052 - 3056, 2002/05
Times Cited Count:12 Percentile:45.92(Physics, Applied)no abstracts in English
Koike, Masato; Sano, Kazuo*; Yoda, Osamu; Harada, Yoshihisa*; Ishino, Masahiko; Moriya, Naoji*; Sasai, Hiroyuki*; Takenaka, Hisataka*; Gullikson, E. M.*; Mrowka, S.*; et al.
Review of Scientific Instruments, 73(3), p.1541 - 1544, 2002/03
Times Cited Count:20 Percentile:68.31(Instruments & Instrumentation)no abstracts in English
Muramatsu, Yasuji; Takenaka, Hisataka*; Gullikson, E. M.*; Perera, R. C. C.*
Advances in X-Ray Chemical Analysis, Japan, 33, p.145 - 154, 2002/00
no abstracts in English